You might consider using a differentially pumped SEM. These systems have
no problem with charging substrates.

-Mike

>>> [email protected] 11/01/04 6:45 PM >>>
Dear MEMS talkers,

I'm new in e-beam lithography(EBL) and looking for the way to make
patterns
on quartz wafer.

The process what I want to do is
1.   PMMA coating on bare quartz
2.   EBL
3.   metal lift-off

The problem is the EBL. I have to focus on the quratz wafer and draw
sub-micron pattern.
Due to the charge-up, I cannot do anything.
Please advice me

Lee, Duhyun


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