A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re : [mems-talk] Ti etching
Re : [mems-talk] Ti etching
2004-11-02
[email protected]
Re : [mems-talk] Ti etching
[email protected]
2004-11-02
Hi,

You can use BOE7-1 for Ti etching and add water to reduce etch rate.

Olivier



Hi,

Does anybody has an idea how to wet etch of Ti layer.

Thanks


_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services. Visit
us at http://www.memsnet.org/




reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
MEMStaff Inc.
Harrick Plasma, Inc.
Mentor Graphics Corporation