Do this:
1. PMMA spin-coat and bake
2. Apply 100 Angstroms Aluminum by thermal evaporation
3. EBL writing
4. Strip Al in KOH
5. Develop patterns in MIBK or MIBK:IPA mixture
6. Apply metal

The Al at only 100A should not effect the dose requirement for EBL.  I use
this procedure very frequently.

Hope this helps,
Bill

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Lee, Duhyun
Sent: Monday, November 01, 2004 5:46 PM
To: [email protected]
Subject: [mems-talk] EBL on insulator


Dear MEMS talkers,

I'm new in e-beam lithography(EBL) and looking for the way to make patterns
on quartz wafer.

The process what I want to do is
1.   PMMA coating on bare quartz
2.   EBL
3.   metal lift-off

The problem is the EBL. I have to focus on the quratz wafer and draw
sub-micron pattern.
Due to the charge-up, I cannot do anything.
Please advice me

Lee, Duhyun


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