You can try warm "PG" (Microchem Corp) which is essentially NMP.  We use a
1:1 mixture of Methylene Chloride : Methanol for stripping PMMA, and find
that it works much better than acetone.

Bill

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of [email protected]
Sent: Monday, November 01, 2004 5:14 PM
To: [email protected]
Subject: [mems-talk] Problem of doing lift-off with PMMA and
AluminumOxide...


Hi All,
I try to pattern my sample on the PMMA950K(500nm) and deposite Al2O3(300nm)
then do the lift-off. But after put in warm acetone for 30MIN, non-thing be
lift-off. Al2O3 is still all over my sample. Do anyone know how to lift-off
the Al2O3? Thanks.

Chien-Chih Huang(Jeff)
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