Source for Si wafers with LPCVD low-stress SiN coating?
Dong
2004-11-02
Hey all,
I am looking for 3" or 4" wafers with 50 to 100 nm SiN films on both
sides. I will make small tranparent membrane windows by wet etching.
I am looking for rebust, continuous SiN films. Anybody know a source
that provides these wafers?
Please reply to my email address and not to the whole groups. Thanks.
Dongxiang Liao