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MEMSnet Home: MEMS-Talk: Source for Si wafers with LPCVD low-stress SiN coating?
Source for Si wafers with LPCVD low-stress SiN coating?
2004-11-02
Dong
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2004-11-03
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2004-11-17
Aravind
Source for Si wafers with LPCVD low-stress SiN coating?
Dong
2004-11-02
Hey all,

I am looking for 3" or 4" wafers with 50 to 100 nm SiN films on both
sides.   I will make small tranparent membrane windows by wet etching.
I am looking for rebust, continuous SiN films.   Anybody know a source
that provides these wafers?

Please reply to my email address and not to the whole groups.  Thanks.

Dongxiang Liao


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