Hi,
I'm looking for an SOI wafer/wafers with the following specs:
Preferably 3" or 4" diameter wafer, but this is not critical
Crystal orientation <100>
Top/device layer:
p-type Si, doped as highly as possible (i.e. resistivity as low as possible,
preferably <~0.1 ohm.cm)
10 um thick
Buried oxide:
At least 1 um thick
Handle wafer:
Doping level not critical.
~500 um thick.
Please reply to me directly, and not the entire mems-talk list, if you have
any ideas. I've solicited quotes from a number of vendors, but ideally I'm
looking for stock that's ready to ship now, not in 6-8 weeks.
Thanks,
Brendan.