Hi,

%5 HF in DI water etches a few tens of angstroms Ti per second easily.

Oray Orkun Cellek
Research Assistant, Ph.D. Candidate
Electrical & Electronics Engineering Department
Middle East Technical University
06531
Ankara, Turkey
e-mail : [email protected]
Tel : +90 312 210 4579
Fax: +90 312 210 1261

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> Re:Hi,
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> Re:Does anybody has an idea how to wet etch of Ti layer.
> Re:
> Re:Thanks
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