Hello All,
I am just looking to find out what methods you guys
use to remove the PDMS mold from silicon wafers that
has shapes ethced onto it. I know some people coat the
wafer with HMDS and then pour the PDMS mold over it
and that helps in peeling the PDMS mold off without
any damage to the master..are there any other methods
that work like this? For eg. does anybody have any
experience in coating the wafer with parylene or any
other methods to do this?

Thank you,
Aravind

--- Dong  wrote:

> Hey all,
>
> I am looking for 3" or 4" wafers with 50 to 100 nm
> SiN films on both
> sides.   I will make small tranparent membrane
> windows by wet etching.
> I am looking for rebust, continuous SiN films.
> Anybody know a source
> that provides these wafers?
>
> Please reply to my email address and not to the
> whole groups.  Thanks.
>
> Dongxiang Liao
>
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>


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