Hi:
We used parylene but found that it can peel out too
easily from the surface. A more successful method was
to self-assemble and attach a fluoro-siloxane on the
wafer.
Karim Faid

 --- Aravind  wrote:
Hello All,
I am just looking to find out what methods you guys
use to remove the PDMS mold from silicon wafers that
has shapes ethced onto it. I know some people coat the
wafer with HMDS and then pour the PDMS mold over it
and that helps in peeling the PDMS mold off without
any damage to the master..are there any other methods
that work like this? For eg. does anybody have any
experience in coating the wafer with parylene or any
other methods to do this?

Thank you,
Aravind


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