A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: SU-8 Cauchy coefficients
SU-8 Cauchy coefficients
2004-11-03
Lidija Malic
2004-11-04
Christopher Blanford
2004-11-04
Pierre Huet
SU-8 Cauchy coefficients
Lidija Malic
2004-11-03
Hi everyone,
I am trying to measure the thickness of the SU-8 films using NANOSPEC tool, and
I need to enter the cauchy coefficients for SU-8. Does enyone know these, or if
anyone has a suggestion of how else I can measure the deposited film thickness,
since right know the values that I have measured do not make any sense.
Thank you all,
Lidia
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Nano-Master, Inc.
Process Variations in Microsystems Manufacturing
MEMStaff Inc.