Lidia -

I did some ellipsometry a couple years back with uncrosslinked SU-8 on
a silicon wafer. The measurements were taken by variable-angle
measurements for a half-dozen or so wavelengths. Here are the Cauchy
parameters I got from the data fitting:

n
A 1.6224
B 1.156E-05
C 6.810E-04

k
A 0
B 0
C 1.171E-05

The fit wasn't excellent, so I would use these values as a guide or a
starting point only.

Chris

On Wednesday, November 3, 2004, at 10:14  pm, Lidija Malic wrote:

> Hi everyone,
> I am trying to measure the thickness of the SU-8 films using NANOSPEC
> tool, and I need to enter the cauchy coefficients for SU-8. Does
> enyone know these, or if anyone has a suggestion of how else I can
> measure the deposited film thickness, since right know the values that
> I have measured do not make any sense.
> Thank you all,
> Lidia
--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: +44 (0)1865 282612; Fax: +44 (0)1865 272690
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