All:
        I have similar process in planning, not as high as 1,050C but only 810C.
Anyone know if SU8 can withstand that temperature? Thanks,

Hong Wu

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Bruno Wacogne
Sent: Wednesday, November 03, 2004 11:55 PM
To: [email protected]
Subject: [mems-talk] 1050 °C for SU8


Dear all,

I have SU8 deposited on pure SI and I would like to oxidise the SI. For
this, I plane to make the oxidation with the following parameters: 1050 °C
in wet oxygen. Does anyone know if the SU8 layer will survive to this
treatment ?

Thank you for your answers,

Bruno

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