Bruno,

In response to your questions about the thermal limitations of SU-8 I can tell
you that SU-8 will degrade, basically turn to carbon, at temperatures much above
400C and therefore I do not believe it will withstand the 1050C heating you are
planning to expose it to....If you have any other questions about SU-8 please
contact me using the details below...

------------------------------------------

Mark Shaw
Regional Sales Manager
MicroChem Corp.

1254 Chestnut Street
Newton, MA 02464
tel: 617-965-5511 ext 308
fax: 617-965-5818
mobile: 617-407-9490

[email protected]
------------------------------------------

I hope this helps

Mark Shaw




Message: 11
Date: Thu, 04 Nov 2004 08:54:34 +0100
From: Bruno Wacogne 
Subject: [mems-talk] 1050 ?C for SU8
To: [email protected]
Message-ID: <[email protected]>
Content-Type: text/plain; charset="iso-8859-1"; format=flowed

Dear all,

I have SU8 deposited on pure SI and I would like to oxidise the SI. For
this, I plane to make the oxidation with the following parameters: 1050 °C
in wet oxygen. Does anyone know if the SU8 layer will survive to this
treatment ?

Thank you for your answers,

Bruno




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