Hi there,

I want to check some micro-optical elements surface
by using optical methods.

I have a large array of microlens and micro-mirrors,
both are 200 by 200 units and could be more, to
check. The micro-mirrors are not plan surfaces but
curved ones, the centre is concave and the size for
each micro-mirrors is 1mm by 3mm. They are made by
diamond machining. The important results of the
checking are Surface Curvatures and Surface
Roughness (rms).

It can be done by doing them one by one with some
built up commercial interferometers, however, that
is really time cost. Therefore, I am looking for an
efficient way to measure their surfaces hopefully in
a couple of time.

Do you have any good idea about this kind of
techniques?

Thanks in advance.

Regards,

Jun



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