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MEMSnet Home: MEMS-Talk: thermal oxide on poly silicon
SU-8 dewetting on silicon
2004-11-04
Jacques Jonsmann
2004-11-04
Mark Fuller
thermal oxide on poly silicon
2004-11-05
[email protected]
2004-11-04
Adrian Brozell
2004-11-08
WALTER Harald
thermal oxide on poly silicon
[email protected]
2004-11-05
Hi,
I want to grow 0.1 micron thermal oxide on a layer of poly silicon(The poly
silicon is evaporated by LPCVD),
I wonder if anybody knows the proper temperature and the rate?

Thanks a lot,


Laleh Rabieirad
PhD Student
ECE Department
Purdue University

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