If anyone knows of any organic substance able to survive these conditions (1050
C /wet O2), please let me know...

Regards,
Pierre x286
-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Christopher Blanford
Sent: November 4, 2004 12:23
To: General MEMS discussion
Subject: Re: [mems-talk] 1050 °C for SU8

Bruno -

SU-8 starts degrading at around 300 C and begins to decompose as the
temperature approaches 400 C in an oxidizing environment. Even in a
vacuum, it degrades significantly at about 400-450 C. I don't think
there's any chance of it surviving the stated conditions.

Chris

On Thursday, November 4, 2004, at 07:54  am, Bruno Wacogne wrote:

> Dear all,
>
> I have SU8 deposited on pure SI and I would like to oxidise the SI.
> For this, I plane to make the oxidation with the following parameters:
> 1050 °C in wet oxygen. Does anyone know if the SU8 layer will survive
> to this treatment ?
>
> Thank you for your answers,
>
> Bruno
--
Christopher F. Blanford
Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
Phone: +44 (0)1865 282612; Fax: +44 (0)1865 272690
PGP keyID: 8D830BC9  http://pgp.mit.edu/

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