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MEMSnet Home: MEMS-Talk: Morphology of sputtered film
Morphology of sputtered film
2004-11-07
FENG Chun Hua
2004-11-07
Isaac Wing Tak Chan
Is LPCVD oxide film really conformal
2004-11-08
X. Yuan
Re: Is LPCVD oxide film really conformal
2004-11-08
X. Yuan
2004-11-09
WALTER Harald
Morphology of sputtered film
FENG Chun Hua
2004-11-07
Dear Members,
   Did any body have experience in controlling the morphology of the
sputtered film on a porous/smooth substrate? I wonder one or more
sputtering parameters may achieve discontinuous/continuous film. Any
suggestion will be greatly appreciated.

Allen


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