Hi,

I suppose the LPCVD oxide (950C) film is conformal.
But I just would like to know whether it is still
the case for a thin (500A) film deposition.
Especially, I want to know whether the vertical
side wall and the top of a structure (rectangular
cross-section) have the same thickness.
Or is there a way that I can measure the thickness
on the side wall? Thanks.

Yuan



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