MEMS-talk

News	MEMSnet Home: MEMS-Talk: Re: Is LPCVD oxide film really conformal Morphology of sputtered film 2004-11-07 FENG Chun Hua 2004-11-07 Isaac Wing Tak Chan Is LPCVD oxide film really conformal 2004-11-08 X. Yuan Re: Is LPCVD oxide film really conformal 2004-11-08 X. Yuan 2004-11-09 WALTER Harald Re: Is LPCVD oxide film really conformal X. Yuan 2004-11-08 The dep temperature should be 920C, not 950C. __________________________________ Do you Yahoo!? Check out the new Yahoo! Front Page. www.yahoo.com reply
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