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MEMSnet Home: MEMS-Talk: SU-8 dewetting on silicon
SU-8 dewetting on silicon
2004-11-04
Jacques Jonsmann
2004-11-04
Mark Fuller
thermal oxide on poly silicon
2004-11-05
[email protected]
2004-11-04
Adrian Brozell
2004-11-08
WALTER Harald
SU-8 dewetting on silicon
WALTER Harald
2004-11-08
Dear Jacques,

Dewetting of thin films is strongly influenced by the cleaning of the
substrate (see Peter Mueller-Buschbaum in J. Phys.: Condens. Matter 15
(2003) R1549-R1582). How does you pretreat your substrates before
spin-coating? If available try plasma treatment.

Harald


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