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MEMSnet Home: MEMS-Talk: Cu deposition on vertical walls of deep holes.
Cu deposition on vertical walls of deep holes.
2004-11-08
Pradeep Dixit
2004-11-09
nga
2004-11-08
Ilan Gluzman
Cu deposition on vertical walls of deep holes.
Pradeep Dixit
2004-11-08
Dear Members,

Does any body know how to deposit Cu on the vertical side walls of 200
microns deep holes of Si (50 microns dia) ?

Sputtering process is not giving me good results.

Any suggestions will be appreciated.

Pradeep

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