Most fine geometries are Cu plated, rather than CVD or PVD.  Did you try
electro-deposition?

-----Original Message-----
From: Pradeep Dixit [mailto:[email protected]]
Sent: Monday, November 08, 2004 9:18 AM
To: [email protected]
Subject: [mems-talk] Cu deposition on vertical walls of deep holes.


Dear Members,

Does any body know how to deposit Cu on the vertical side walls of 200
microns deep holes of Si (50 microns dia) ?

Sputtering process is not giving me good results.

Any suggestions will be appreciated.

Pradeep