hi zhiyan..

i had teh same problem a couple of days back.. what was the thicknes of ur
PR.. and what was the thickness of ur metalized layer...

i solved my problem by spinning a thicker layer of PR and having about
500A of metalized layer
regards
karthik

> Dear friends:
>
> I got a trouble when doing metal lift-off with very small feature size. I
> deposited Ti/Au on the patterned PR and then tried to lift off. The
> feature
> size if about 8~10um. But even i soaked it in the acetone for very long
> time,
> the PR still can't be stripped off. It seems the metal not only covered
> the
> top of the PR but also the side wall. I am wondering if you have any idea
> and
> suggestions on how to strip off the PR.
>
> Thank you very much.
>
> Zhiyan
>
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