Hi all

I think 8~10 micrometer lift-off should have no problem. It was possible
for me under 1 micrometer. It looks like PR sidewall has huge slope or
PR has been hardened too much. Did you try to cool down the substrate
during the metal deposition? I suggest you not to hard bake PR for a
long time & high temp.

Good luck

Ryoung

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of zhiyanl
Sent: Monday, November 08, 2004 11:10 AM
To: General MEMS discussion
Subject: [mems-talk] Metal Lift-off

Dear friends:

I got a trouble when doing metal lift-off with very small feature size.
I
deposited Ti/Au on the patterned PR and then tried to lift off. The
feature
size if about 8~10um. But even i soaked it in the acetone for very long
time,
the PR still can't be stripped off. It seems the metal not only covered
the
top of the PR but also the side wall. I am wondering if you have any
idea and
suggestions on how to strip off the PR.

Thank you very much.

Zhiyan

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