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MEMSnet Home: MEMS-Talk: RIE Etch of PMMA
DRIE Etch Stop
2004-11-09
Craig Lowrie
RIE Etch of PMMA
2004-11-09
[email protected]
2004-11-10
Keith Baldwin
2004-11-11
Andrew Tucker
RIE Etch of PMMA
[email protected]
2004-11-09
Hi,
I need to etch the 2000A PMMA layer with RIE.The masking Photoresist could be
AZ1518 or similar PR's.
I wonder if anybody has a recipe for that,

Thanks,


Laleh Rabieirad
PhD Student
ECE Department
Purdue University

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