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MEMSnet Home: MEMS-Talk: oven/hot plate bake
oven/hot plate bake
2004-11-11
Matteo Dainese
2004-11-11
Brubaker Chad
2004-11-11
Bill Moffat
2004-11-15
[email protected]
oven/hot plate bake
Matteo Dainese
2004-11-11
Hello all,
I would like to increase my awareness
when I'm processing with the different
polymers I'm using. I have this small question:
what is the difference between
curing/soft baking/hard baking a photoresist,
or a polymer in general, on a hotplate or
in a normal oven (same temperature)?
Is there any reason why I should choose either
one or the other?
I would be happy if any of you can give an opinion.
Thank you

Matteo Dainese

Graduate student
KTH - Royal Institute of Technology
Stockholm
Sweden

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