Try Marc Madou: "Fundamentals of Microfabrication"

http://www.crcpress.com/shopping_cart/products/product_detail.asp?sku=08
26

- or search the on-line books at http://www.engnetbase.com/ - requires
subscription, though...

> yeah, I contacted Analog jet, but they told me to talk to the
> local dealer.
> maybe I will be lucky tomorrow to fix some stuff with Analog
> in cologne.
> thx.
> any other ideas where I could get some tutorials oder guides?
>
> On Thursday 11 November 2004 08:53, Manscher Martin wrote:
> > Try SensoNor in Norway - www.sensonor.no. I know they make MEMS
> > accelerometers for cars. Another alternative is Analog Devices -
> > http://www.analog.com/accelerometers.html
> >
> > > For a helicopter flight controller I need an intertial system
> > > digital gyros
> > > are to large and to expensive for a low-budget project.
> > > Because I'm new an there must be plenty of information I need
> > > some guidance.
> > >
> > > In the first place I want to know, who sales mems and how
> > > much will they cost.
> > > I need just 6 of them.
> > > I guess they are able to measure in 2 directions...
>