Hi Matteo
You will find useful information regarding this subject on the Brewer
Science website. _www.brewerscience.com_ (http://www.brewerscience.com)
Just click on the Cee logo on the left side, then on Technical Info also on
the left side. The sections "Hotplate Overview" and "Bake Process Theory"
should give you most of the information you require and what we consider to be
the advantages of Hotplate over oven methods.
You will see that on our benchmount and smaller Hotplate systems we have
three methods of baking which can be used individually or in combination to
achieve the correct bake for the type of substrate and material being
processed.
It is possible also to program any or all of these into the process recipe to
ensure repeatability.
The first of these Proximity baking is achieved by forcing gas (usually
nitrogen) through small very small holes in the Hotplate surface allowing the
substrate to be supported on a bed of the gas rather than being in direct
contact with the Hotplate surface. This method allows a slower warm-up than
contact
bake methods and can be advantageous when baking thick films where
blistering would otherwise be a problem
The second method is Soft Contact Bake where gravity alone is used to hold
the substrate onto the surface of the Hotplate. This method generally offers
less uniformity since the substrate-hotplate thermal interface is not as
efficient as in hard contact baking and can be somewhat random in variation.
In the third method, Hard Contact Bake, the substrate is pulled down onto
the surface of the hotplate by the application of a vacuum applied to the
underside of the substrate. Very small holes are machined into the Hotplate
surface in a pattern which optimises vacuum distribution without the formation
of
cold spots or warping of the substrates.
We do hope that this and the information contained on our website helps but
should you require anything further then please do not hesitate to contact me
directly.
Best regards
Graham George
Brewer Science
Tel: +44 (0) 1604 634134
Fax: +44 (0) 1604 602068
Mob: +44 (0) 7776 137427
e-mail: [email protected]
In a message dated 11/11/2004 15:30:05 GMT Standard Time, [email protected]
writes:
Hello all,
I would like to increase my awareness
when I'm processing with the different
polymers I'm using. I have this small question:
what is the difference between
curing/soft baking/hard baking a photoresist,
or a polymer in general, on a hotplate or
in a normal oven (same temperature)?
Is there any reason why I should choose either
one or the other?
I would be happy if any of you can give an opinion.
Thank you
Matteo Dainese
Graduate student
KTH - Royal Institute of Technology
Stockholm
Sweden
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