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MEMSnet Home: MEMS-Talk: Re: aluminum etchant
Re: aluminum etchant
2004-11-15
Eric Woods
2004-11-15
Wilson, Thomas
2004-11-17
Shay Kaplan
Re: aluminum etchant
Eric Woods
2004-11-15
 would recommend using Type A as well, at a lower temp (maybe 47C?)..
I have experience with multi-level CMOS metallization processes, and
we had that problem about Al native oxide reforming - a few seconds in
that etchant will knock out that native oxide.  I've also found that
BOE will attack Al203, but more slowly.

-Eric Woods

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