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MEMSnet Home: MEMS-Talk: thermal or optical releasable polymer
thermal or optical releasable polymer
2004-11-15
[email protected]
thermal or optical releasable polymer
[email protected]
2004-11-15
I am looking for polymer that can joint two wafers (Si-to-Si or
Si-to-glass) temporarily for processing, and then can be separated
(released) by either thermal or optical (UV) treatment.  Anyone has the
vendor info, please let me know. Thanks!
Gene

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