Dear All,

I am looking for a classic technical paper on MEMS.

1. " Anisotropic etching of Silicon" by K.E.Bean, IEEE transaction on
Electron Device, Vol ED-25, pp- 1185-1193, Oct 1978.
2. "Silicon as Mechanical Material" , K. E. Petersen, Proceedings of
IEEE, vol. 70, no. 5, pp. 420-457, May 1982.

The above papers are very famous and i am sure every body must have
seen them. I will be thankful to you if some body forward me these
papers.

Thanks,
Pradeep Dixit