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MEMSnet Home: MEMS-Talk: Etch SiN
Etch SiN
2004-11-16
Zhiyan Liu
2004-11-16
Kirt Williams
2004-11-17
Karin Buchholz
emulsion maskplates
2004-11-17
Isaac Wing Tak Chan
2004-11-16
William Lanford-Crick
Etch SiN
Zhiyan Liu
2004-11-16
Dear friends,

I want to etch 250nm of SiN without attack the GaAs substrate. I tried the
wet etch using HF and photoresist as the etch mask. But the PR all peeled
off during the etching even after hard baked. I am wondering if anyone has
a suggestion on the etch of SiN.

Thank you very much,

Zhiyan


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