Su-8 from micro chem should do the trick, but it is tricky to work with very
thick films.  They need slow even heating for pre and post exposure bakes.
If they are heated to fast the photoresist will vaporize and form bubbles in
your layer of resist.

Adrian

Here is the link

http://www.microchem.com/products/pdf/SU8_50-100.pdf

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of E. Sendler
Sent: Monday, November 15, 2004 9:15 PM
To: [email protected]
Subject: [mems-talk] high resolution dry photoresist


Hello to all,
I am looking for a high resolution dry photoresist film, with film thickness
between 50-100 microns, and able to produce features (holes) of
approximately 15-20 microns diameter.  Does anyone know of any resist which
would satisfy those specs?

Thanks,
Ed

Kresge Eye Institute - Detroit,MI

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