Dear Walter,
Thank you very much for the info! What I need is a glue or polymer
can be spin-coated on a wafer, then bonded to a second wafer, after
processing on either of the wafer to separate them w/o any damage. To
separate them, either using illumination by UV or IR or by heating. I
heard that there are some polymers can do this type of job, but do not
know the vendors.
Best regards!
Gene Gan
Skyworks Solutions, Inc.
5221 California Ave.
Irvine, CA 92612
Tel: (949) 231-3489
"WALTER Harald"
Sent by: [email protected]
11/17/2004 04:07 AM
Please respond to General MEMS discussion
To: , "General MEMS discussion"
cc:
Subject: [mems-talk] RE: thermal or optical releasable polymer
Dear Gene,
Edward De Meter of Penn-State-University (http://www.psu.edu/) published
a glue which hardens by illumination with UV and gets brittle under IR.
I don't know if the glue is applicable to your wafers.
Harald
> I am looking for polymer that can joint two wafers (Si-to-Si or
> Si-to-glass) temporarily for processing, and then can be separated
> (released) by either thermal or optical (UV) treatment.
> Anyone has the vendor info, please let me know. Thanks!
> Gene
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