>From my limited experience with PZT film, I have found that it also
seems to have some pyroelectric properties (e.g. heat will cause it to generate
electricity).  Since the film is piezoelectric, this can cause it
buckle and flex during the curing process.

I would suggest a slowly ramped cure as a fix for this problem (e.g.
insert wafers into furnace at 100C, hold for 10 min, ramp at 10C / min
to 250C, ramp at 7C / min to 450C, and ramp at 5C / min to 600C, cure
for 20 min, cool down and withdraw (let it cool to room temperature
before withdrawal from the furnace.

Also, other student I know have had success by using RTP/RTA at 800C
for 5 minutes.

Try both methods.

-Eric