Dear Regan,

the following book gives you a good overview about the different bonding
processes:

"Semiconductor Wafer Bonding"
Q. Y. Tong, U. Gösele
ISBN: 0471574813

Best Regards,
Margrete Zoberbier

----------------------------------------------------
SUSS MicroTec
Applications Center RSC Europe
Margarete Zoberbier
Schleissheimer Str. 90
85748 Garching
Germany
Phone   +49 89 32007 - 380
Fax     +49 89 32007 - 390
email   [email protected]


----------------------------------------------------------------------------
---------------
Message: 7
Date: Fri, 19 Nov 2004 18:12:40 +0900
From: Regan Nayve 
Subject: [mems-talk] types of substrate bonding
To: [email protected]
Message-ID: <[email protected]>
Content-Type: text/plain; charset=iso-2022-jp

Dear MEMS members,

I want to know the different types of substrate bonding. Could
anyone recommend a website or article that deals with this
topic in a broad manner but also have detailed contents?

Thanks,
Regan