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MEMSnet Home: MEMS-Talk: What Is the Dielectric Constant of Polysilicon
What Is the Dielectric Constant of Polysilicon
2004-11-22
J.J wang
What Is the Dielectric Constant of Polysilicon
J.J wang
2004-11-22
Hi, Everybody,

Would anyone please tell me how much is the polysilicon dielectric constant? Can
I assume it is the same as crystal silicon?

Thanks.
J.J.Wang


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