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MEMSnet Home: MEMS-Talk: Al thin film pitting?
Al thin film pitting?
2004-11-24
Andrew Xiang
Al thin film pitting?
Andrew Xiang
2004-11-24
Aluminum thin film  150A thick deposited on top of glass. After some
envrionmental test(temperature and humidity), uniform pitting occurs.
The size of pit varies from 0.5um to 5um. 0.5um-5um diameter iiregular shaped Al
thin film is peeled off.

Al film is done using evaporation.

What is the cause of such corrosion?


thanks
Andrew

reply
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