Dear,

I try to deposit RuO2 film by RF magnetron sputtering.
Powder RuO2 is my raw material. Before the deposition,
i made it pellet form as my target material. May i
know whether it is suitable to use the pellet directly
as the sputtering target? Or it is necessary to sinter
it first before the deposition? If yes, then whats the
temperature for sintering RuO2 pellet?

Thanks!

from,
Chong Cheong Wei
Institute of Microengineering and Nanoelectronics
University of Kebangsaan Malaysia.

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