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MEMSnet Home: MEMS-Talk: How to clean holes of PI and Mylar films?
How to clean holes of PI and Mylar films?
2004-11-25
oliver77
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How to clean holes of PI and Mylar films?
oliver77
2004-11-25
Hello

I am looking for a method to clean the holes'  walls  of polyimide and Mylar
films.

The holes was drilled by excimer laser.
The diameters of holes are in 20um~125um.
PI or Mylar film's thickness is 100um.
There are debris , carbine and carbon black sticking on the surface and wall of
holes.
I have tried to clean them with acetone .
But obviously I cannot reach the wall of the holes.

Can ultrasonic cleaning work it out?
How much should be power and frequency of the ultrasonic cleaner ?
Is there any kind of solvent can help to clean them?

Thanks in advance

Oliver Tseng

Project Manager
K-Jet Laser Tek. Inc.
www.kjet.com.tw
Taiwan



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