Hello all,
I am looking for a supplier to pattern a single metal layer on top of
silica wafers.
The details are:
Substrate: Silica wafer
Metal: Chrome or aluminium
Metal thickness: 100nm
Feature size: 100nm tracks, 100nm gaps
Does anyone know of a supplier with this capability? I don't mind how
the metal is patterned. So far I have made enquiries about dry etch and
ion-beam milling, but the small feature size is a problem for these
techniques.
Regards
Peter Ayliffe
Mesophotonics Limited
Chilworth Business Incubator
2 Venture Road
Chilworth Science Park
Southampton SO16 7NP
Tel: +44 (0)23 8076 3752
Fax: +44 (0)23 8076 3757
[email protected]