Oliver -

It seems like ultrasonic cleaning would work, but the mylar will float in
solvent.  You are going to have to tie it down.  Five minutes in a Branson
2510 in an ethanol solution should clean the mylar.

Adrian

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of oliver77
Sent: Thursday, November 25, 2004 8:53 AM
To: [email protected]
Subject: [mems-talk] How to clean holes of PI and Mylar films?


Hello

I am looking for a method to clean the holes'  walls  of polyimide and Mylar
films.

The holes was drilled by excimer laser.
The diameters of holes are in 20um~125um.
PI or Mylar film's thickness is 100um.
There are debris , carbine and carbon black sticking on the surface and wall
of holes.
I have tried to clean them with acetone .
But obviously I cannot reach the wall of the holes.

Can ultrasonic cleaning work it out?
How much should be power and frequency of the ultrasonic cleaner ?
Is there any kind of solvent can help to clean them?

Thanks in advance

Oliver Tseng

Project Manager
K-Jet Laser Tek. Inc.
www.kjet.com.tw
Taiwan


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