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MEMSnet Home: MEMS-Talk: gold, photoresist, UV light, bubbles
gold, photoresist, UV light, bubbles
2004-11-29
Rick Giuly
2004-11-29
Z.,W.Y.(Lydia)
2004-11-30
Brad Cantos
2004-11-30
Marco Doms
gold, photoresist, UV light, bubbles
Marco Doms
2004-11-30
Rick,

during exposure, the photo active compound of photoresist converts into a
carboxylic acid seperating a N2 molecule. Your bubbles probably are caused
by this nitrogen generation. Try to expose the resist prior to depositing
another layer on top of it (after a sufficiently long softbake) to ensure
that all the nitrogen can diffuse from the resist layer before you
hermetically seal it.

Marco

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