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MEMSnet Home: MEMS-Talk: RIE - keep Temp constant
RIE - keep Temp constant
2004-11-30
Karin Buchholz
2004-11-30
Brent Garber
2004-11-30
Shile
2004-11-30
Tripp, Marie Kathleen
2004-11-30
[email protected]
2004-12-01
GRECO Florent
Can vaccum grease be used to bond PDMS to Silica
2004-12-01
Adrian Brozell
2004-12-02
Mohanraj Soundarapandian
RIE - keep Temp constant
Tripp, Marie Kathleen
2004-11-30
Hi Karin,

We use vacuum grease.  However Trichloroethylene is needed to remove it
afterwards.  Not the nicest of solvents...

-Marie



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