Hi,=20
=20
The properties of the deposited Teflon-like film depends on the =
condition used in the DRIE machine, even the machine itself. From my =
experience,the power and flow rate of C4F8 are quite important. The film =
is characterized by a disordered but cross-linked polymer.=20
=20
I did not aneal the film after the passivation. But i feel that, since =
the different expansion coefficient of the film and silicon are =
different, they may break cohesively if the temperature is too high.
=20
It seems that the film can resist the Acetone; but i did not measure the =
duration of that. One effective chemical to remove it is Piranha. =20
=20
You may read a paper=20
D. A.Brevnov, M. J. Barela, M. J. Brooks, G. P. Lopez, P. B. Atanassov, =
J ElectroChem. Soc., 2004, 151, B484-B489. , although the material is =
not silicon.
=20
Good luck
=20
Best Regards
Guo Xun
________________________________
From: Eric J. Correa [mailto:[email protected]]
Sent: Wed 12/1/2004 6:10 AM
To: [email protected]
Subject: [mems-talk] PTFE Deposition on Si
Hi:
I am trying to deposit PTFE monolayer on Si by using c4f8 in
a DRIE-tool. I was wondering if any of you have any
recommendation for this process such like annealing, surface
treatment, etc. Does anybody know the maximum temperature
that these layers can resist?. For my process also I need
to soak my samples in Acetone. I just do not know what
would be the effect that this may cause in the PTFE layers.
Regards,
=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=
=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=
=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D
Eric J. Correa Rivera
Graduate Student
Mechanical Engineering
University of Illinois at Urbana Champaign
"Nunca dejes de sonre=EDr, ni siquiera cuando est=E9s triste, porque =
nunca
sabes quien se puede enamorar de tu sonrisa"
Gabriel Garc=EDa =
Marquez
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