Message-Id:
March 12, 1998
Dear MEMS and IC Fab community:
I would like to purchase 0.5 micron to 1 micron thick silicon nitride
(LPCVD) coated or deposited silicon ( 2 inch dia to 4 inch dia, 100
orientation, 250 - 500 micron thick) substrates. I request you to
provide me some details (telphone number, fax number, address, e-mail
etc.) if you know or come accross any company that can supply. I
appreciate your help. Thank you.
Sincerely,
Ram
Dr. R. Ramesham
JPL/Caltech
Tel.: 818 354 7190