Hi Lee,
  I would suspect that the thermal conductivity and electrical
resistivity of the materials would influence the deposition rates. In
case you use different  boats for holding the tagets, material
differences may also have an impact on the net thermal conductivity.

-Mike




>>> [email protected] 12/6/2004 5:34:32 PM >>>
Dear members,

I'm a graduate student of Physics.
I would like to know about the mechanism of power in the electron beam
evaporator.
We made a simple e-beam evaporator for metallization (Ti, Pt, and Pd)
using 1mm diameter metal rod in the lab.

As you may know well, the emission current determine the power in the
evaporator.
Strangely, I found the emission current of Ti is higher than that of Pd
to get the same evaporating rate,
even though the melting point of Ti is less than that of Pd .
In my experience in MEMS instruments, the emssion current of Ti is very
lower than that of Au.
Could you how to explain this fact?

As another question, I would like to know the behavior of metal rod
(source).
In the Pt case, the droplet was formed on top of the rod in
evaporating.
But Ti rod was bent after evaporating and Pd was formed the needle
shape like SPM tip.
Does anyone know about these things?

Thank you in advance.

Lee




_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk

Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/