Presuming you're not looking for the answers to a homework assignment
then you should go talk to Bob Parsons, a prof. at UBC and an expert on
sputter.

That said, no you probably don't want to sputter in pure O2, the sputter
yield of O2 vs. a heavier element (Ar for example) wouldn't be
impressive.

Beyond that you haven't mentioned your equipment setup, is it DC, pulsed
DC, RF?  Any secondary activation?  Magnetron?  Metal or oxide target?

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of ypy0816
Sent: Tuesday, December 07, 2004 11:26 AM
To: [email protected]
Subject: Spam:[mems-talk] How to sputtering ZnO

Hi,

Does anyone know how to sputtering ZnO?
I sputter ZnO using pure O2, is that right?
I get 400nm~500nm thickness after sputtering one hour.

Sincerely,
Jacob Yeh

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