Dear Jacob

Sputtering ZnO depends on your sputterer, your substrate and differents
parameters. One very important thing is how clean are your substrates and
vaccum chamber. You could have a look to this paper we published in 1995:

"Deposition, evaluation and application of sputtered zinc oxide thin
films", International Journal of Optoelectronics, Vol 10, No 1, pp. 9-18.

I am sorry, but I do not have a .doc or .pdf version of it.

Good luck,

Bruno


Le 05:46 07/12/2004, vous avez écrit:
>Does anyone know the parameter of sputtering ZnO?
>
>Thanks in advance.
>Jacob Yeh
>Dept. Mech. Eng.
>University of British Columbia
>_______________________________________________
>[email protected] mailing list: to unsubscribe or change your list
>options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>Hosted by the MEMS Exchange, providers of MEMS processing services.
>Visit us at http://www.memsnet.org/