Dear friends

I am wondering if anybody has experience on pattern In coated GaAs surface.
I coated the GaAs surface with 1um of In, and then try to pattern it. I use
the positive PR shipley 1818 and expose to UV light. But i can't get a
sharp pattern, the edges are smear out. If anybody has suggestion, i really
appreciate it.

Thank you very much,
Zhiyan